Melnik Y.A., Metel A.S., Mustafaev E.S., Ney H.A.
The new method of tools hardening with titanium nitride coatings synthesized using titanium evaporation in a crucible-anode of glow discharge is proposed. The study showed that with a decrease in the surface area of the anode, a positive anode fall of potential appears, its value and energy of electrons bombarding the crucible grow with the gas pressure decrease thus providing the titanium evaporation and a high coating deposition rate on the substrate.
Keywords: wear-resistant coatings, titanium evaporation, anode-crucible, electron heating, hollow cathode glow discharge..